Positive photoresists are widely used in lithographic process in microelectronics and in optics for the fabrication of relief components. With the aim of identifying molecular modifications among positive photoresists unexposed and previously exposed to ultraviolet light the electron stimulated ion desorption technique coupled to time-of-flight mass spectrometry was employed in the study of the AZ-1518 photoresist. Mass spectra were obtained as a function of the electron beam energy, showing specific changes related to the photochemical decomposition of the photoresist. This reinforces the applicability of the technique to investigate and characterize structural changes in photosensitive materials.

This work shows routes to recover some elements from their laboratory wastes and broken apparatus (thermometers and densimeters). Most elements chosen present a chemical behavior in aqueous solution which is not currently studied in the ordinary experimental classes. The routes were based on the previous knowledge of the qualitative composition of the wastes treated. Wastes containing chromium were the most difficult to treat. The elements were recovered in good yields and can be reused in new experiments. This work was a very good experience in chemistry for students and shows the need of managing wastes for a better environment.