In this study, the crystallization process of SrTiO3 thin films, prepared by a chemical method, was characterized by Fourier Transformed Infra Red (FT-IR), Grazing Incident X-ray Diffraction (GIXRD), Thermal Analysis (TG) and X-ray Absorption Near Edge Structure (XANES). The results showed that an amorphous inorganic phase is formed, consisting of clusters of oxygen five-coordinate titanium. The amorphous phase begins crystallizing at temperatures above 450 °C. No intermediate crystalline phase and no preferential orientation was observed for films deposited on MgO (100). FT-IR results suggest the presence of the carbonate group. However, the low thermal stability of this group and the low crystallization temperature of the observed SrTiO3 phase indicate that this carbonate is adsorbed.