We use a global model (volume averaged) to study plasma discharges in molecular oxygen gas in the 1-100 mTorr pressure range. This model determines densities of positive ions O2+ and O+ , negative ion O- , electrons, ground state O2 and O atoms, and metastables O2(a¹deltag) and O(¹D), and electron temperature as function of gas pressure and input power, for a cylindrical discharge. We apply the model to O2 discharges and the results are compared to a particle-in-cell simulation (PIC), experimental data and a volume-averaged global model developed at the University of California at Berkeley. We find that the total positive ion density increases with pressure at low pressures (up to approximately 30 mTorr), and decreases at higher pressures. The electronegativity decreases with increased power and increased pressure as predicted by the global models presented in the literature. The predictions for electron temperature are also in agreement with these models. However, there is a discrepancy betweeen these global models and PIC simulations and experimental data, for 20 and 40 mTorr cases, concerning electronegativity calculations. PIC simulations yield much higher electronegativities. There are strong indications that this is due to the assumption of Maxwellian electron energy distribution functions in the global model, while in the PIC simulations this is clearly not the case.

Filmes finos de PMMA foram preparados a partir de solução e expostos ao plasma de CF4+H2, visando mudar o Índice de Refração (I.R.) da superficie do PMMA através da fluoração. Os filmes de PMMA expostos ao plasma, denominados de filmes ópticos, foram caracterizados usando as técnicas: ESCA, RBS, FTIR, gravimetria, ângulo de contato, refratometria e elipsometria. Os resultados revelaram que as superfícies de PMMA foram revestidas com uma fina camada de hidrofluorcarbono polimérico, com espessuras variando entre 0,43 e 0,49mim. A camada de hidrofluorcarbono polimérico na superfície do PMMA foi responsável pela significante redução do seu I.R. de 1,49 para 1,43. A concentração de flúor nessa camada aumentou gradualmente em função da profundidade, sendo menor na sua superficie. Como o átomo de flúor é responsável pela redução do I.R., concluiu-se que o I.R. no revestimento fluorado do filme óptico variou também de forma gradual. A técnica de polimerização por plasma de CF4+H2 mostrou-se útil para modificar in situ os I.R. da superfíces de guias de ondas e fibras ópticas poliméricas, visando reduzir as perdas e aumentar a velocidade de transmissão de dados.

Fluorinated PMMA optical films were obtained using the CF4+H2 plasma polymerisation technique. The characterisation analysis: ESCA, RBS, FTIR, gravimetry, contact angle, refractometry and ellipsometry, revealed that a hydrofluorcarbon polymer was deposited on the optical films exposed to the plasma. Fluorine concentration increased gradually with the fluorinated film depth (0.43-0.49mum). A refractive index 1.42-1.43 was found on the surface of the fluorinated films, lower than the PMMA (1.49). This fluorinated layer could present a gradient refractive index, being reciprocal of the Fluorine concentration. The potential advantages to obtain graded-index polymer waveguides and optical fibres are loss reductions and higher transmission rates.