LiNbO3 thin films were prepared using a polymeric precursor solution deposited by spin coating on (0001) sapphire substrate. Heat treatment of the films was carried out in a microwave oven at 400 ºC for 15 and 20 min. A SiC susceptor (material with high dielectric loss) was used to absorb microwave energy and transfer the heat to the film in order to promote crystallization. The susceptor was placed above the film or below the substrate. Thus, the influence of the heat flux direction on the sample crystallization was verified. The films were characterized by X-ray diffraction, atomic force microscopy and spectrophotometry (transmittance) in the UV-Visible region and the refractive index was determined with an ellipsometer. The epitaxial growth was observed for the film with the susceptor placed below the substrate. Random growth was verified when the susceptor was placed above the film. The films were relatively dense, homogeneous and smooth with good optical properties.
thin films; LiNbO3; microwave; SiC; epitaxy
