Study of squeeze film damping in a micro-beam resonator based on micro-polar theory

In this paper, squeeze film damping in a micro-beam resonator based on micro-polar theory has been investigated. The proposed model for this study consists of a clamped-clamped micro-beam bounded between two fixed layers. The gap between the micro-beam and layers is filled with air. As fluid behaves differently in micro scale than macro, the micro-scale fluid field in the gap has been modeled based on micro-polar theory. Equation of motion governing transverse deflection of the micro- beam based on modified couple stress theory and also non-linear Reynolds equation of the fluid field based on micropolar theory have been non-dimensionalized, linearized and solved simultaneously in order to calculate the quality factor of the resonator. The effect of micropolar parameters of air on the quality factor has been investigated. The quality factor of the of the micro-beam resonator for different values of non-dimensionalized length scale of the beam, squeeze number and also non-dimensionalized pressure has been calculated and compared to the obtained values of quality factor based on classical theory.

MEMS; Micro-polar theory; Squeeze film damping