SiOx Top Layer on DLC Films for Atomic Oxygen and Ozone Corrosion Protection in Aerospace Applications

Ferreira, L.L.; Radi, P.A.; Silva Sobrinho, A.S. da; Vieira, L.; Leite, D.M.G.; Recco, A.A.C.; Reis, D.A.P.; Massi, M.

doi:10.1590/1980-5373-MR-2020-0511

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Article • Mat. Res. 24 (3) • 2021 • https://doi.org/10.1590/1980-5373-MR-2020-0511 copy

SiOx Top Layer on DLC Films for Atomic Oxygen and Ozone Corrosion Protection in Aerospace Applications

Authorship SCIMAGO INSTITUTIONS RANKINGS

Every year, billions of dollars are invested in research and development for space applications, including new systems, new technologies, and new materials. DLC (Diamond-Like Carbon) is a promising material for use in these applications, but its use faces a technological barrier, since it is severely etched by atomic oxygen and ozone. In this study, SiOx-DLC thin films were deposited as a top layer of diamond-like carbon (DLC) films on Ti-6Al-4V substrates to increase resistance against corrosion by atomic oxygen and ozone as well as meet the requirements for use in Low Earth Orbit (LEO) satellites. The corrosion resistance of the films was evaluated using oxygen plasma, and the tribological and mechanical properties were investigated. The SiOx-DLC top layer reduced the corrosion rate two orders of magnitude and increased the critical load from 16.2 ± 1.5 N to 18.4 ± 0.4 N.

Keywords:
DLC; SiOx-DLC; tribology; atomic oxygen; ozone; corrosion protection

Film	Steps	Plasma Environment	Pressure (Torr)	Temperature (°C)	Time (min)
DLC	Cleaning	Argon	10^-1	550	40
	Interlayer	HDMSO^*	10^-1	500	30
	Interlayer	Argon	10^-1	500	30
	Mixed layer	Hexane	10^-2	230	5
	Mixed layer	HDMSO	10^-2	230	5
	DLC	Hexane	10^-2	211	90
SiOx-DLC	Cleaning	Argon	10^-1	550	40
	Interlayer	HDMSO	10^-1	500	30
	Interlayer	Argon	10^-1	500	30
	Mixed layer	Hexane	10^-2	230	5
	Mixed layer	HDMSO	10^-2	230	5
	DLC	Hexane	10^-2	211	60
	SiOx-DLC	HDMSO	10^-1	108	30

Sample	Corrosion Rate (Å/min)	Surface Roughness Ra (nm)
DLC	434 ± 26	100 ± 6 (non-corroded)
DLC	434 ± 26	92 ± 5 (corroded)
SiOx-DLC	2.4 ± 0.6	69 ± 6 (non-corroded)
SiOx-DLC	2.4 ± 0.6	57 ± 5 (corroded)

Chemical elements	DLC (non-corroded)	DLC (corroded)	SiOx-DLC (non- corroded)	SiOx-DLC (corroded)
C	97.5 ± 0.2	89.6 ± 0.7	27.6 ± 0.3	26.0 ± 0.4
O	0.9 ± 0.2	2.2 ± 0.5	30.2 ± 0.3	31.7 ± 0.4
Si	1.1 ± 0.1	7.3 ± 0.2	41.4 ± 0.1	41.5 ± 0.1
Ti	0.4 ±0.0	0.7 ± 0.0	0.7 ± 0.1	0.7 ± 0.0
Al	0.1 ± 0.1	0.2 ± 0.0	0.1 ± 0.0	0.1 ± 0.0
V	0.0 ± 0.0	0.0 ± 0.0	0.0 ± 0.1	0.0 ± 0.0

Samples	H (%)	I_D/ I_G	H (GPa)	E (GPa)	H/E (x10^-2)
DLC non-corroded	33.8 ± 0.9	0.40 ± 0.05	9.1 ± 2.8	79.0 ± 13.0	11.5 ± 1.6
DLC corroded	32.7 ± 1.1	0.47 ± 0.04	6.3 ± 1.8	66.0 ± 13.0	9.5 ± 0.8
SiOx-DLC non-corroded	37.0 ± 0.5	0.36 ± 0.04	2.3 ± 0.2	25.5 ± 1.8	9.0 ± 0.1
SiOx-DLC corroded	36.4 ± 0.6	0.41 ± 0.02	2.2 ± 0.1	27.2 ± 1.3	8.0 ± 0.1

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