The substrate preparation for CVD diamond growth is of basic importance due to several reasons. A new molybdenum substrate preparation method, the aluminum oxide abrasion jetting, is introduced and compared with the traditional ones. Raman Scattering Spectroscopy (RSS) and Scanning Electron Microscopy (SEM) characterize CVD diamond films. CVD diamond films of good quality and uniformity were obtained. The substrate preparation by aluminum oxide blasting allowed for a higher nucleation rate.
Diamond CVD; substratum of molybdenum; growth rate
