Abstract

ROUXINOL, F. Paulo; TRASFERETTI, B. Cláudio; LANDERS, Richard  and  MORAES, Mário A. Bica de. Hot-filament metal oxide deposition (HFMOD): a novel method for depositing thin films of metallic oxides. J. Braz. Chem. Soc. [online]. 2004, vol.15, n.2, pp. 324-326. ISSN 0103-5053.  http://dx.doi.org/10.1590/S0103-50532004000200026.

This short report describes a novel method for the synthesis of metal oxide thin films. The experimental setup consists of a metal filament installed inside a vacuum chamber. The filament can be heated by an ac power supply while oxygen is admitted into the chamber using a mass flowmeter. From reactions between oxygen and the heated metal filament, volatile oxide species, Me_xO_y, where Me is the metal, can be formed, condensing on a nearby substrate. We have observed that thin films of W_xO_y and Mo_xO_y can be satisfactorily deposited by this novel method. Although several techniques were used to characterize the oxides, this note emphasizes the results obtained by X-ray Photoelectron Spectroscopy (XPS).

Keywords : WO₃; MoO₃; thin films; XPS; CVD.