Print version ISSN 1516-1439
TRAVA-AIROLDI, Vladimir Jesus et al. Studies of molybdenum surface modification for growth of adherent CVD diamond film. Mat. Res. [online]. 2003, vol.6, n.2, pp. 305-309. ISSN 1516-1439. http://dx.doi.org/10.1590/S1516-14392003000200028.
Surfaces with very poor mechanical and frictional properties can be improved, or even, acquire new properties similar to diamond if good adherent CVD diamond film is obtained on it. In this work, nitrogen ions were sub-implanted on pure molybdenum as a means to enhance CVD diamond film adherence. Deposition time from 2 up to 60 h were used for deposition of 10 to 400 µm thick CVD diamond films with very good adherence on sub-implanted molybdenum substrate. Characterizations were carried out by XPS, X-ray diffraction and nano indentation on prepared surfaces prior to diamond growth and after the onset nucleation. The ionic sub-implantation with nitrogen possibly assists in adhesion, with the creation of a thin layer of nitrates and complexes.
Keywords : CVD Diamond; surface modification; ion sub-implantation; thin film.