Abstract

DIAS, Claudio André Chagas Martins  and  PAES JUNIOR, Herval Ramos. Production and characterization of zinc oxide thin films intrinsic and doped with aluminum and boron. Matéria (Rio J.) [online]. 2006, vol.11, n.3, pp. 267-272. ISSN 1517-7076.  http://dx.doi.org/10.1590/S1517-70762006000300015.

Intrinsic (ZnO), Al-doped (ZnO:Al) and B-doped (ZnO:B) thin films were deposited by spray-pyrolysis on glass substrates. The influence of parameters such as doping concentration, substrate temperature (Ts) and thermal processing under vacuum on the structural, optical and electrical properties of the films, was studied with the purpose to consider their application as transparent conductive oxides. Electrical resistivity values of 1.21 x 10-2 and 6.97 x 10-3 W.cm were obtained for ZnO:Al (1 at.% - Ts = 550°C) and ZnO:B (0,5 at.%. - Ts = 500°C) heat treated films, respectively, and an optical transmittance of 48%. The value of the figure of merit of these films indicated a light superiority of the ZnO:B film. In general, the heat treatment decreases the sheet resistance of the films from 3 to 4 orders of magnitude. The energy of optical GAP varied from 3,00 to 3,30 eV.

Keywords : Zinc oxide; spray-pyrolysis; electrical and optical properties; transparent conductive oxide.