@article{viana_silva_morimoto_bonnaud_2001, title={Analysis of SiO2 Thin Films Deposited by PECVD Using an Oxygen-TEOS-Argon Mixture}, volume={31}, ISSN={0103-9733}, url={https://doi.org/10.1590/S0103-97332001000200023}, DOI={10.1590/S0103-97332001000200023}, number={2}, journal={Brazilian Journal of Physics}, publisher={Sociedade Brasileira de Física}, author={Viana, Carlos E. and Silva, Ana N. R. da and Morimoto, Nilton I. and Bonnaud, Olivier}, year={2001}, month={June}, pages={299–303} }