@article{ramos_chaves_martins_durrant_rangel_silva_bortoleto_2021,  title={Growth Evolution of AZO thin Films Deposited by Magnetron Sputtering at Room Temperature},  volume={24},  ISSN={1516-1439},  url={https://doi.org/10.1590/1980-5373-MR-2021-0052},  DOI={10.1590/1980-5373-MR-2021-0052},  journal={Materials Research},  publisher={ABM, ABC, ABPol},  author={Ramos, R. and Chaves, M. and Martins, E. and Durrant, Steven F. and Rangel, E.C. and Silva, T.F. da and Bortoleto, J.R.R.},  year={2021},  pages={e20210052} }