@article{oliveira_dias_araújo_ramirez_silva neto_hübler_mendes_damasceno_tentardini_2023, title={Influence of Substrate Temperature on Microstructure of Zirconium Silicon Nitride Thin Films Deposited by Reactive Magnetron Sputtering}, volume={26}, ISSN={1516-1439}, url={https://doi.org/10.1590/1980-5373-MR-2023-0235}, DOI={10.1590/1980-5373-MR-2023-0235}, journal={Materials Research}, publisher={ABM, ABC, ABPol}, author={Oliveira, F.S. and Dias, I.L. and Araújo, P.L.L. and Ramirez, D.A. and Silva Neto, P.C. and Hübler, R. and Mendes, F.M.T. and Damasceno, I.Z. and Tentardini, E.K.}, year={2023}, pages={e20230235} }