TY - JOUR T1 - Effect of PECVD deposition parameters on the DLC/PLC composition of a-C:H thin films JO - Journal of the Brazilian Chemical Society A1 - Oliveira, Éder C. A1 - Cruz, Sandra A. A1 - Aguiar, Paulo H. L. SN - 0103-5053 UL - 10.1590/S0103-50532012005000027 VL - 23 Y1 - 2012 PB - Brasil ER -