Hydrogenated amorphous carbon (a-C:H) thin films were synthesized on the surface of materials to improve mechanical, optical and chemical properties. In the present study, plasma enhanced chemical vapor deposition (PECVD) was performed to produce a-C:H films with PLC (polymer like carbon) and DLC (diamond like carbon) phases. The influences of the acetylene partial pressure and chamber pressure on the chemical structures of the products were evaluated by infrared reflection absorption spectroscopy (IRRAS) and Raman spectroscopy. Moreover, the morphology and thickness of the films were investigated by atomic force microscopy (AFM) and profilometry, respectively.
amorphous hydrogenated carbon; PECVD; parameters; diamond like carbon; polymer like carbon
