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CeO2 thin films deposited by spray pyrolysis

Cerium dioxide thin films were deposited on glass substrates, using spray pyrolysis technique. CeCl3.7H2O diluted in water and isopropyl alcohol were used as precursors materials. The influence of the deposition parameters on the film properties was investigated. It was observed that films deposited in temperatures higher than 400°C were free from cracks, with continuous surface, dense and good adherence to the substrate. The film was measured by SEM analyses; the thickness values ranged between 0,3 and 1,0 µm. Analyses by X-rays diffraction (XRD) revealed that the films were polycrystalline with a cubic structure of fluorite type. The dependence of both the electrical conductivity and activation energy of the electrical conduction process on the deposition temperature was small. The activation energy was of 0.60 ± 0.03 eV.

Cerium dioxide; spray pyrolysis; in films


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